Abstract

SummaryModern leak detectors in vacuum technologyIn many areas of industrial manufacturing, quantitative leak tightness measurements are required in order to analyze product quality. This article examines three approaches to vacuum leak testing, which utilize different measuring principles and completely different working pressures. The processes are divided into “non‐gas selective”, “single gas selective” and “double gas selective”.The pressure rise method does not work gas‐selectively. In so‐called foil test chambers the pressure rise measurement is used in optimized design and is particularly suitable for leak testing in the food industry.The classic test gas vacuum leak detection is a gas‐selective method. The test gas is selectively detected and the chamber is pumped independently of the type of gas. Major innovations in current device solutions are the extension of the measuring range and improved convenience in use.To achieve a detection limit of less than 10−12 mbar·l/s, a double gas selective operation is used, residual gases from the test chamber are selectively pumped, additionally, the test gas detection is selective.

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