Abstract
Presents a new method combining Taylor series expansion and Arnoldi method to develop reduced-order models for weakly nonlinear MEMS devices. A fixed-fixed beam structure with squeeze-film damping effect is studied. Simulation results with the reduced-order models demonstrate good agreement with the data generated from the finite difference simulation but with an order of magnitude reduction in execution time. The reduced-order models have been integrated in a multi-level circuit simulator for composite circuit and micromechanical simulations.
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