Modelling of the Positive Column in an Argon‐Hexamethyl‐disiloxane dc Glow Discharge

Abstract

AbstractA model is presented of the positive column of a dc glow discharge in argon with small admixtures of hexamethyldisiloxane (HMDS). The axial electric field, the ion production rates for direct‐, stepwise‐, pair‐, and Penning ionization, the densities of metastable Ar atoms and of electrons, and the wall current of HMDS ions are calculated in dependence on HMDS admixture and discharge current density. For the calculations particle balance equations were used for a diffusion determined plasma in a mixture of two gaseous components. The reaction rates for the electron collision processes were determined applying the electron distribution function calculated for pure argon. Taking into account PENNING ionization of HMDS molecules by metastable argon atoms the decrease of electric field for increasing HMDS admixtures is according to the experimen‐tally measured values. Also ion wall currents and electron densities are compared with experimen‐tal values for thin film formation rate and results of probe measurements.