Abstract
Abstract We present a theoretical model for the interaction of excimer laser radiation with rough polycrystalline CVD diamond films, showing the influence of angle of incidence, irradiation intensity and number of laser pulses. A new regime of laser treatment — self-limiting laser ablation — was found, which allows faceted films to be smoothed without wasteful ablation of the bulk. Multipulse XeCl laser (308 nm) irradiation of our diamond films, grown on silicon wafers, confirms that such polishing is accomplished.
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