Abstract
A model for a finite length cylindrical electronegative (EN) plasmais constructed by obtaining an approximate solution when negative ions existover the entire plasma, but with ion flux to the walls dominating internalrecombination flux. The profiles obtained in this manner are useful for makingcalculations even when the recombination flux competes with the diffusion fluxfor ion loss. The result is that there is an approximately parabolic profilein the smaller dimension (radius or axial length) with a flat central regionand a similar edge profile in the larger dimension. The results are extendedto include plasmas in which the electronegative region does not occupy theentire cylinder by introducing a single length scale that defines a smaller ENcylinder embedded in the larger plasma. Single types of positively andnegatively charged ions and electrons are assumed to be the principal chargedspecies. The plasma thus formed is embedded in a full model of an attachingfeedstock gas with all relevant species and reaction rates included. Thecomplete model can be considered as a generalized global model which includesone additional spatial parameter and one additional equation. Theresulting equations are readily solved as in previous global models. Theresults are compared with experiments in an oxygen discharge, obtainingreasonably good agreement for the measurable parameters.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
