Modelling and simulation of microwave plasma reactor

Abstract

Using the Finite Integration Technique, we have simulated electromagnetic field distributions in the microwave plasma reactor. The relationship between electric field distribution and the length of antenna inserted into the microwave plasma reactor has been simulated. The effect of the length of antenna inserted into the microwave plasma reactor on the plasma discharge is also discussed. The results show that the plasma discharge is closer to the substrate with increasing length of antenna inserted into the cylinder. Our results can be used to optimise the reactor design.