Abstract
Microwave plasma reactor is often of particular interest due to their wide range of industrial applications, especially in high-end manufacturing. However, there exist problems of unstable plasma and small discharge area in conventional microwave reactors at 2.45 GHz. An edge tapered 915 MHz/TM021 microwave reactor evolved from reactors at 2.45 GHz is presented to improve the strength, area, and uniformity of microwave field for plasma applications. An electromagnetic model of a microwave reactor with the new coupling antenna composed of a tapered platform and a coaxial inner conductor is simulated. The simulation results show that the electric field strength in the new reactor with a size optimized coupling structure is more concentrated compared to similar reactors. A 2D axisymmetric hydrogen plasma discharge model based on self-consistent fluid simulation of this new reactor is presented. The obtained results show that this kind of model can lead to a better understanding of the physical processes occurring in these kinds of microwave reactors.
Highlights
Microwave discharge plasmas have widely been used in a number of applications in modern science and technology due to their ability to provide a high density of charged particles and active species.1–4 It has been demonstrated that the microwave plasma has good potential in plasma processing applications such as corrosion protection, wear resistance, diffusion barrier, hydrophilic and hydrophobic layers, materials with low and high dielectric constant, semiconductor films, and so on.5–8 If properly designed, the plasma discharges would be stable and enable with a high efficiency of microwave power transfer to plasma.One way to create a microwave plasma is utilizing a single or multimode resonance cavity, which couples microwave power into the plasma via Joule heating
The quality factor Qf quantifies the aggregation of the microwave electric field and can be used as a standard to measure the performance of the coupling structure
A new 915 MHz cylindrical cavity type of microwave plasma reactor with the edge tapered deposition platform was made based on the result of electromagnetic and plasma simulation
Summary
Microwave discharge plasmas have widely been used in a number of applications in modern science and technology due to their ability to provide a high density of charged particles and active species. It has been demonstrated that the microwave plasma has good potential in plasma processing applications such as corrosion protection, wear resistance, diffusion barrier, hydrophilic and hydrophobic layers, materials with low and high dielectric constant, semiconductor films, and so on. If properly designed, the plasma discharges would be stable and enable with a high efficiency of microwave power transfer to plasma. The plasma discharges would be stable and enable with a high efficiency of microwave power transfer to plasma. In order to improve the discharge of the plasma inside a cavity reactor including the intensity of electric field, the discharge of secondary plasma, and the change of resonance mode, the coupling antenna of the reactor needs to be investigated carefully. There exist some issues in common: Most of the new designed microwave plasma reactors are hybrid coupling through an annular gap.. The more the coincident of the field at the coupling position, the higher the efficiency of the coupling structure, which means the less existence of other modes.. In order to highlight the advantages of the new coupling structure, an electromagnetic simulation and a simplified hydrogen plasma model were applied to compare the exciting microwave fields and the coupling result, respectively.
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