Abstract
This paper presents the results of modeling the most important component of a one-step technology of fabricating kinoform lenses in thick photoresist layers with increased diffraction efficiency due to the formation of backward slopes of Fresnel zones with a steepness of up to 90° using oblique laser beams. It is shown that this method of fabricating volume structures makes it possible to significantly increase the steepness of backward slopes of the zones in low-contrast photoresists (k = 3) and to form practically vertical slopes in moderate-contrast photoresists (k = 10).
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