Abstract
Abstract The dynamic hysteresis nonlinearity and various uncertainties of the piezoelectric positioning platform are critical factors limiting its high-precision applications. To address this, the dynamic characteristics of the piezoelectric positioning platform under various loads are identified based on the linearization of the Prandtl-Ishlinskii inverse model. The inverse compensation error and load disturbances are attributed to model uncertainties, which are modeled in the frequency domain. A μ-synthesis controller is designed to improve the tracking accuracy of the piezoelectric positioning platform under uncertainty disturbances. Experimental results indicate that with the μ-synthesis controller, the piezoelectric positioning platform achieves a relative error (RE) of less than 2.71% when unloaded. The RE is less than 6.03% for load disturbances of 100g, 200g, and 300g, respectively. These results demonstrate that the designed controller meets the high-precision positioning performance requirements under various load disturbance conditions.
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