Modeling of a CMOS Convective Accelerometer for HDL integration

Abstract

This paper introduces an analytical modeling of a convection heat CMOS accelerometer. The modeling approach relies on the use of fundamental results and is validated using both experimental data issued from test vehicles and FEM analysis. Since such accelerometers are based on the CMOS technology, the proposed model is intended for further HDL integration. The objective is to enable system level simulation and optimization within standard microelectronic CAD software.