Abstract
A system level model of a force balance accelerometer in which the proof mass is levitated with electrostatic forces is presented. The position of the proof mass is detected capacitively and controlled electrostatically. The mathematical modelling of the system is described. In particular, equations for the capacitances and electrostatic forces are derived and verified by comparison with a finite element model. They are then implemented in a Simulink system level model of the accelerometer.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.