Modeling, Calculation and Realization of Au/Nb2O5 Substrates for Surface Plasmon Resonance Sensors

Abstract

Introduction. Sensor devices based on the surface plasmon resonance (SRP) phenomenon are widely used among the tools of information and diagnostic technologies. The main part of a device based on the surface plasmon resonance phenomenon is a sensor substrate, which consists of a glass plate, a film of plasma-supporting metal, usually gold, and additional layers to increase the sensitivity of the research. Depending on the thickness of the additional dielectric layers, the following types of sensors can be implemented: a conventional SPR sensor with a gold film without a dielectric; an Au/dielectric SPR sensor with a dielectric thickness less than the critical one, in which the system can maintain the plasmonic mode; a waveguide sensor on a metal sublayer, with a dielectric thickness sufficient for the emergence of waveguide modes. The Au/Nb2O5 thin-film system is promising for creating sensor substrates due to the high refractive index of Nb2O5 and its exceptional chemical and mechanical resistance. The purpose of the work. This work is devoted to computer modelling, calculation of performance characteristics and implementation of Au/Nb2O5 sensor substrates for SPR devices, including the Plasmontest series devices developed at the Institute of Cybernetics of the National Academy of Sciences of Ukraine. The behaviour of the characteristics of the SPR substrates with a plasma-supporting gold film, SPR substrates with sensitivity enhancement by an additional layer of Nb2O5 of nanometre thickness and with a waveguide layer of Nb2O5 thickness more than 150 nm are analysed. Calculations were performed for both refractive sensors on SPR and biosensors. Results. The theoretical analysis was carried out by computer modelling in Winspall and calculations in MATLAB using the Fresnel equations and the matrix method, which allowed a comprehensive analysis of the shape of the reflection curves, angular sensitivity, resolution and angular ranges for sensors with different dielectric coatings. It is shown that at a thickness of 0-10 nm, the Au/Nb2O5 structure will work as a SPR sensor with increased sensitivity, and at a thickness of 150-210 nm as a waveguide sensor on a metal sublayer. But, as calculations have shown, only the Au/Nb2O5 SPR sensor is promising for practical implementation to increase the sensitivity of biosensor measurements. The work carried out on the development of thin-film technology, which includes vacuum deposition of a thin-film structure of adhesive Nb (1–2 nm), plasma-supported Au (50 nm), Nb (3–5 nm) and thermal annealing (to oxidise the top layer of niobium), made it possible to implement Au/Nb2O5 substrates for SPR studies. Experimental studies have shown that the angular sensitivity of the Au/Nb2O5 refractometric SPR sensor is 1.5 times higher than that of a SPR sensor with a single Au film at niobium oxide layer thickness of about 6 nm. Thus, the experimentally determined increase in the angular sensitivity of the Au-Nb2O5 SPR sensor is consistent with the theoretical data. Conclusions. Calculations have shown an increase in the angular sensitivity of SPR sensors for Au/Nb2O5 sensor substrates compared to conventional Au film substrates for both refractometric (1.6 times) and biosensor (1.8 times) studies. The sensors on Au/Nb2O5 substrates for SPR studies, which we have designed and practically implemented, are cheap to manufacture, have higher sensitivity, and due to the exceptional chemical and mechanical stability of Nb2O5, can be used repeatedly in rather aggressive environments. Keywords: computer modelling, surface plasmon resonance, sensor, refractometer, biosensor.