Abstract
Base on the significance of understanding research objects, modeling and validation of ultra precision positioning system is studied in this paper. Taking different reduction methods of leaf springs into consideration, a rigid body model and an elastic body model has been developed. Identifying unknown parameters by the least square method, the validation results of two models are compared. The conclusion indicates that the elastic body model is better when the dynamic characteristics of the positioning system before the stable state are concerned and the rigid body model is more appropriate if the accuracy of the whole model is focused.
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