Abstract

The present work aims to design a new polarized piezoelectric sensor actuator. This sensor actuator not only can achieve sensing and execution at the same time, but also has the advantages of small size and high integration. A mathematical model of stack displacement with input voltage and number of layers was established. The relationship between the charge generated by quartz crystal and external force was numerically analysed. The static and modal analysis of the structure were carried out to obtain the measured force range and the maximum working frequency. The transient simulation is used to verify the follow-up law of the actuator to the alternating signal. The Electric field interference analysis of the piezoelectric sensor actuator was performed to eliminate the interference from the electric field generated by the actuator. The results show that the measured force range of the actuator is up to 1 kN, with the maximum working frequency is 1000 Hz, and the actuator can follow the drive voltage signal well, with an almost negligible electric field interference in the sensor part. This paper provides a new method and theory for the study of self-sensing actuators.

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