Modeling and Simulation of Opposite Type MATA Using MEMS Nodal Cell Library

Abstract

In MEMS nodal analysis method, more available libraries of nodal models are needed. By analyzing the mathematic model and the equivalent model of the electro-thermal-mechanical beam, this paper shows the steps of building a library of a nodal element for HSPICE. Then the cell library is used to simulate the opposite type micro-array thermal actuator (MATA). At last it shows the DC sweep performance and the transient performance of opposite type MATA. In this paper, to verify the reusability of the beam cell, opposite type MATA is all consisted of the electro-thermal-mechanical beam cell in library.