Abstract
This paper proposed a novel design of microgyroscope based on MEMS structures and optic interferometric microdisplacement measurement technique. The gyroscope consists of microvibrator and interferometric readout. Using Coriolis force, the vibrator transfers the system rotation into a forced vibration; the induced vibration can be sensed by the interferometric microdisplacement measurement system. The optic measurement system has two mirrors which will reflect two rays into a detector. The comprehensive studies on the formulation and analysis of the proposed gyroscope have been undertaken; two key sensor equations have been derived in the first time in the world: (1) relation between rotation and phase shift of light Δφ = (4πl0/λ) + (8π/λ)(xmax Qy/ωy)Ω(t)sin (ωdt), (2) relation between rotation and interferometric intensity of light I(t) ≈ (8π/λ)(xmax Qy/ωy)Ω(t)sin (ωdt)sin (4πl0/λ). The comparison of the proposed gyroscope and well‐know Sagnac formulation has been investigated; it shown that the proposed model is much better than Sagnac ones. The new model has finally get rid of needing very long fiber in the case of Sagnac gyroscope. The innovative model gives a new hope to fabricate high accurate and cheaper gyroscope. To date, the proposed gyroscope is the most accurate gyroscope.
Highlights
Gyroscopes are the inertial measurement devices, which are used to detect angular rotation rate of the objects. which are widely used for guidance, navigation, airplanes, spacecrafts, missiles, automobiles, and even consumer electronics to maintain orientation, measure the angular motion of essential objects for the control and stabilization of its attitude.The gyroscope development is going through the processes from the macrosize to the microsize
The micro applications require the host structures to be transformed from the huge spin wheel mass to the tiny light vibration mass or optical interferometer measurement system fabricated by microelectromechanical system (MEMS) technology like MEMS vibratory gyroscopes and fiber optical gyroscopes [1]
Based on the comprehensive review of the optical gyroscopes and MEMS silicon-based gyroscopes, we propose a hybrid model which combine MEMS silicon-based oscillation gyroscopes and micro-optical interferometer readout system
Summary
Gyroscopes are the inertial measurement devices, which are used to detect angular rotation rate of the objects. which are widely used for guidance, navigation, airplanes, spacecrafts, missiles, automobiles, and even consumer electronics to maintain orientation, measure the angular motion of essential objects for the control and stabilization of its attitude. MEMS gyroscopes are suitable for longtime employ because of low power consumption, and the bulk fabrication processes can produce batch applications. The sensors and readout electronics are usually integrated on a single chip to reduce parasitic capacitance and size. The capacitance readout electronic circuits have the essential shortcoming at the sensitivity, responding time, bandwidth, and so forth. Optical type gyroscopes have advantages at the sensitivity, performance, responding time, lifetime, and bandwidth. They occupy the high sensitivity and performance markets. The large size comes from the long distance light path to create the enough interference and the lack of MEMS fabrication technology for the micro-optical devices. For example, the no delay performance of integrated micromechanical devices results in their wide use in high-speed application. With the small testing proof mass, a micromechanical accelerometer is adapted to measure the high acceleration
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