Abstract
Piezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency increases, the performance of piezoelectric actuators further degrades. In addition, the impact of force on piezoelectric actuators cannot be ignored in practical applications. Dynamic hysteresis with force-voltage coupling makes the hysteresis phenomenon more complicated when force and driving voltage are both applied to the piezoelectric actuator. Existing hysteresis models are complicated, or inaccurate in describing dynamic hysteresis with force-voltage coupling. To solve this problem, a force-voltage-coupled Prandtl–Ishlinskii (FVPI) model is proposed in this paper. First, the influence of driving frequency and dynamic force on the output displacement of the piezoelectric actuators are analyzed. Then, the accuracy of the FVPI model is verified through experiments. Finally, a force integrated direct inverse (F-DI) compensator based on the FVPI model is designed. The experimental results from this study show that the F-DI compensator can effectively suppress dynamic hysteresis with force-voltage coupling of piezoelectric actuators. This model can improve the positioning accuracy of piezoelectric actuators, thereby improving the working accuracy of the micro- or nano-operating system.
Highlights
Piezoelectric actuators are widely used in the field of micro-/nanopositioning with the continuous development of manufacturing [1] for products such as atomic force microscopes [2,3], fast tool servos (FTSs) [4,5], and piezoelectric inkjet printers [6,7]
The results show that the force-voltage-coupled Prandtl–Ishlinskii (FVPI) model can accurately describe dynamic hysteresis
The maximum absolute error and maximum relative error were used to evaluate the accuracy of the FVPI model
Summary
Piezoelectric actuators are widely used in the field of micro-/nanopositioning with the continuous development of manufacturing [1] for products such as atomic force microscopes [2,3], fast tool servos (FTSs) [4,5], and piezoelectric inkjet printers [6,7]. The positioning accuracy of the piezoelectric actuator is affected by force in some applications such as using FTSs to process complex surfaces. Piezoelectric actuators generally use flexible hinges as guiding mechanisms. In this case, piezoelectric actuators are mainly subjected to force along the direction of expansion and deformation (the forces mentioned below are dynamic forces along the direction of expansion and deformation). The hysteresis phenomenon is more difficult to describe when force and driving voltage are applied to the piezoelectric actuator at the same time. This phenomenon is defined as dynamic coupling hystere-
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