Abstract
AbstractA model of the transient response of a semiconductor gas sensor under modulation heating has been successfully constructed. The model consists of the heat conduction process from the heater to the sensor surface, the reaction process on the sensor surface, and the diffusion process near the sensor surface which provides a supply of flammable gas. The calculated sensor response agreed well with experimental results obtained with a pulsed power supply to the heater. Because we can predict the sensor transient response, the model will be useful in distinguishing kinds of gases and odors by using the transient response of semiconductor gas sensors. © 2010 Wiley Periodicals, Inc. Electron Comm Jpn, 93(11): 20–27, 2010; Published online in Wiley Online Library (wileyonlinelibrary.com). DOI 10.1002/ecj.10318
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