Abstract
A type of closed-loop system model for capacitive MEMS accelerometer, with simple working clock , is presented in this paper. After establishing the force-feedback model and disgussing the magnitude of the feedback voltage, the readout interface IC for closed-loop detection is designed and the layout area of the ciruit is only 1435×2543 um2. Post simulation results indicated that the circuit has large detection range, high accuracy and linearity, giving evidence for the validity of our model.
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