Abstract
The application of atomic force microscopy (AFM) for mode shape imaging of both out-of-plane and in-plane vibrating RF micromechanical resonators is described in this work. The modulation of the amplitude of the resonator together with the lock-in detection of the AFM signal at the modulation frequency allows to achieve picometer-scale sensitivity for detecting the resonator vibration at arbitrarily large frequencies. We compare the application of this method for the characterization of the main out-of-plane thickness mode of an AlN film bulk acoustic resonator (FBAR) at 1.595 GHz and the in-plane vibrating first radial and wine-glass modes of a poly-SiGe disk resonator at 34.5 and 47.6 MHz, respectively. Our results demonstrate the capability of this method to image in-plane vibrating modes by measuring their small Poisson-coupled out-of-plane component.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
