MOCVD Growth of Thick β-(Al)GaO Films with Fast Growth Rates

Lingyu Meng, A F M Anhar Uddin Bhuiyan + Show 4 more

https://doi.org/10.1021/acs.cgd.3c00779

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Journal: Crystal growth & design	Publication Date: Aug 31, 2023
Citations: 1

Abstract

MOCVD Growth of Thick β-(Al)GaO Films with Fast Growth Rates

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