MnO thin film cathode for rechargeable microbatteries

Abstract

Thin films of MnO were deposited by electron beam evaporation using a MnO or MnO 2 source. The thin films were charaterized by X-ray and electron diffraction. The Coulomb titration curve reveals a potential plateau of 2.9 V over the composition range 0.05< x<2.0. The chemical diffusion coefficient of lithium in thin films at 15°C is 2.7×10 −14 cm 2/ s for 0< x<0.01 and 2.2×10 −15 cm 2/s for 0.02< x<0.06. Good reversibility for lithium insertion and extraction is demonstrated by cyclic voltammetry.