Abstract
Rapidly emerging applications for microaccelerometer and microgyroscope position sensors require a major advance in stability and resolution. A highly sensitive, stable, and robust sensor interface circuit that can be applied to inertial navigation sensors is presented in this paper. The circuit can be applied to any fully differential capacitive sensor or to a differential piezoresistive one. The high sensitivity is achieved by a double-sampling technique, compensating switch, and feedback method with a high loop gain. The charge injection by the MOS switches is reduced below the thermal noise level of the operational amplifier (opamp). Resolution and stability levels of 10 −8 with a supply variation of 10% are achieved.
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