Abstract

The methods and the results of calculations of the elastic properties of misfit and lattice dislocations and disclinations in thin films are considered. For one-phase films the following problems are solved: a straight edge dislocation perpendicular to the film surfaces; wedge disclinations parallel or perpendicular to the surfaces. In the case of a film on a substrate, the critical thickness for the appearance of misfit dislocations is determined in the continuum model. For multilayer films (superlattices) the effect of a reduction in the grown-in dislocation density is analysed. The behaviour of dislocations in two-phase films is also briefly reviewed.

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