Abstract

At present, grazing incidence mirrors are used almost exclusively as the first optical element in VUV and soft x-ray synchrotron radiation beamlines. The performance of these mirrors is determined by thermal and mechanical stress-induced figure errors as well as by figure errors remaining from the grinding and polishing process. With the advent of VUV and soft x-ray undulators and wigglers has come a new set of thermal stress problems related to both the magnitude and the spatial distribution of power from these devices. In many cases the power load on the entrance slits and gratings in these beamlines is no longer negligible. The dependence of thermally induced front-end mirror figure errors on various storage ring and insertion device parameters (especially those at the National Synchrotron Light Source) and the effects of these figure errors on two classes of soft x-ray beamlines are presented.

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