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https://doi.org/10.1016/s0924-4247(97)01623-3
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Cite Journal: Sensors & Actuators: A. Physical |  Publication Date: Jan 1, 1998 |
 Citations: 6 |
A non-contact, non-destructive technique for the depth profiling of micromachined structures is presented. Based on the mirage or optical-beam deflection method of photothermal spectroscopy, an experimental measurement of a 8 μm step in silicon is given by way of illustration.
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