Abstract
A piezo-tube-driven miniature-size scanning tunneling microscope (STM) is described into which a 2-axes heterodyne interferometer is integrated to measure the x and y positions of the tip. Using this combination piezo-tube, drifts and deflection nonlinearities can be determined on-line with subnanometer sensitivity, thus providing a basis for absolute scaling of the scans and for tunneling spectroscopy at high spatial resolution. The STM operates at ambient pressure and constitutes the specimen stage of a modified light microscope allowing the positioning of biological structures adsorbed to thin carbon films relative to the scanning tip.
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