Abstract
A miniature force sensor for the measurement of forces and moments at a human fingertip is designed and realized. Thin silicon pillars inside the sensor provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A corrugated silicon ring around the force sensitive area provides the spring constant in shear direction and seals the interior of the sensor. To detect all load components, capacitive read-out is used. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a wide force range of up to 60 N in normal direction, ± 30 N in shear direction and a torque range of ± 25 N mm.
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