Abstract
A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
