Mini-Scanning Electron Miscroscope Concept

Abstract

The scanning electron microscope has already established itself as one of the most useful instrument developments in recent years. The SEM provides 20 times greater useful magnifications and up to 500 times greater depth of-field than the best optical microscopes. Until the introduction of the Mini-SEM concept, the cost and complexity of SEM's has limited their use primarily to large research oriented laboratories.Design features, specifications, and operational characteristics will be reviewed. The Mini-Rapid Scan with resolution of 750Å will be described, along with the Mini-SEM with resolution of 150 to 200Å. Both of these are table top scanning electron microscopes. Various specimen stage options will be illustrated. Other accessories extending the SEM's versatility will be described, such as the energy dispersive x-ray system