Abstract
We report on the fabrication of ridge waveguide operating at mid-infrared wavelength in MgO:LiNbO3 crystal by using O5+ ion irradiation and precise diamond blade dicing. The waveguide shows good guiding properties at the wavelength of 4μm along the TM polarization. Thermal annealing has been implemented to improve the waveguiding performances. The propagation loss of the ridge waveguide has been reduced to be 1.0dB/cm at 4μm after annealing at 310°C. The micro-Raman spectra indicate that the microstructure of the MgO:LiNbO3 crystal has no significant change along the ion track after swift O5+ ion irradiation.
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