Abstract
Nanocrystalline structured films of the alloy Ni11Co11Fe66Zr7B4Cu1 were deposited by pulsed laser ablation deposition onto fused quartz substrates. A substrate temperature of 300°C was found to produce films consisting of body-centered-cubic (bcc) metallic grains suspended in an amorphous matrix. The bcc grain size ranged from 5–8nm for substrate temperatures up to 300°C. Measured values of coercivity were consistently below 4Oe for films having a saturation magnetization, as 4πMS, of ∼16kG with in-plane uniaxial anisotropy fields of 25to30Oe. The ferromagnetic resonance peak-to-peak derivative linewidth was measured to be 34Oe at a frequency of 9.61GHz. The zero magnetic field ferromagnetic resonance occurred at ∼2GHz. These films exhibit soft magnetic properties, high saturation induction, low microwave loss, and the structural stability desirable for thin film inductor applications.
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