Abstract
ABSTRACT Ba0.6Sr0.4TiO3 (BST) thin films were deposited on Pt/Ti/SiO2/Si (100) substrates by radio-frequency magnetron sputtering. Nanocrystal lines on the BST films surface were obtained by microwave electrical field irradiation annealing. Atomic force microscopy (AFM) results reveal that microwave annealing can give rise to certain self-assembled nanocrystal lines on the BST films surface, and the length and the width of the nanocrystal lines are dependent on annealing time. After the films further annealed for 20 min or more, the nanocrystal lines broke up into spherical nanocrystals of about 25 nm in diameter. The directions of BST nanocrystal lines are determined by microwave electrical field. X-ray diffraction (XRD) shows that the microwave-annealed BST films are (110) preferred orientation. Specular X-ray reflectivity (XRR) measurement shows that the surfaces of the microwave-annealed BST thin films exhibit anisotropy.
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