Abstract
A theory is constructed for a near-field microwave microscope operating under tunneling breakdown between a probe and a conducting sample. Its informative characteristics are determined by the probe impedance, which is formed from the capacitive impedance Z p of the near-field probe–sample interaction and tunnel junction impedance Z t. A technique whereby the impedance Z p is calculated using coaxial geometry of the probe is developed. Some properties of the impedance Z t defined via the developed theory and published experimental data are investigated.
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