Abstract

Simple microfluidic systems for handling large particles such as three-dimensional (3D) cultured cells, microcapsules, and animalcules have contributed to the advancement of biology. However, obtaining a highly integrated microfluidic device for handling large particles is difficult because there are no suitable microvalves for deep microchannels. Therefore, this study proposes a microvalve with a trapezoid-shaped cross-section to close a deep microchannel. The proposed microvalve can close a 350 m deep microchannel, which is suitable for handling hundreds of micrometer-scale particles. A double-inclined lithography process was used to fabricate the trapezoid-shaped cross-section. The microvalve was fabricated by bonding three polydimethylsiloxane layers: a trapezoid-shaped liquid channel layer, a membrane, and a pneumatic channel layer. The pneumatic balloon, consisting of the membrane and the pneumatic channel, was located beneath a trapezoid-shaped cross-section microchannel. The valve was operated by the application of pneumatic pressure to the pneumatic channel. We experimentally confirmed that the expansion of the pneumatic balloon could close the 350 m deep microchannel.

Highlights

  • IntroductionA variety of microfluidic devices, ranging from simple disposable microchannels to highly integrated microfluidic systems, have contributed to the advancement of biology [1]

  • A variety of microfluidic devices, ranging from simple disposable microchannels to highly integrated microfluidic systems, have contributed to the advancement of biology [1].These microfluidic devices have been developed for handling small particles to middle-size particles, such as biomolecules and cells

  • We examined the performance of the microvalve, that is, the capability of introducing suspension of the large particles through the trapezoid-shaped cross-section channel, relationship between flow rate and velocity in the trapezoidal channel, and response time to open/close the channel using the microvalve

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Summary

Introduction

A variety of microfluidic devices, ranging from simple disposable microchannels to highly integrated microfluidic systems, have contributed to the advancement of biology [1]. These microfluidic devices have been developed for handling small particles (nanoscale) to middle-size particles (microscale), such as biomolecules and cells. Microfluidic devices with deep microchannels and large cross-sectional areas have been developed [13,14] to handle large particles (on the scale of hundreds of microns), such as 3D cultured cells, microcapsules, and animalcules. The maximum size of water bottle plankton is about 200 μm [18], which is the required channel depth for handling large particles

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