Abstract
AbstractMicrovalves are important for fluid control in a variety of applications, ranging from miniaturized chemical analysis systems, to precision manufacturing and miniature fuel cells. MEMS technology provides the opportunity to miniaturize valves that work with smaller sample volume, operate rapidly with low power and can potentially be integrated with other components on a single chip. A review of actuators for microvalves is provided, including electrostatic, magnetic, piezoelectric, thermal, shape memory alloy and hydrogel. The design and simulation of a magnetic latching microvalve is provided as a case study. The fabrication by surface micromachining with low temperature, potentially CMOS compatible processing is given.
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