Abstract
This paper presents a development of a microtransformer device fabricated using MEMS technology. The device is designed for higher switching frequencies beyond to 50 MHz power applications. The microtransformer features a closed magnetic core and six identity coils (three coils on primary and three coils on secondary side). Depending on connecting technique, this design allows a wide flexibility to set different values of inductance and of transformer winding ratio. As a magnetic core material Fe-Co alloy is applied, this device shows a significant improvement compared to the first fabricated prototypes with Ni-Fe magnetic core.
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