Microstructure of reactive magnetron sputtered S-phase coatings with a diffusion sub-layer

Abstract

The main objective of the work was to investigate the microstructure of S-phase coatings obtained by reactive magnetron sputtering at different temperatures and with various nitrogen concentrations in the working atmosphere. Particular attention was paid to the formation of a diffusion sub-layer in the austenitic substrate. The coatings were deposited on austenitic stainless steel substrates in an argon–nitrogen gas mixture. Three different nitrogen concentrations in the working gas were used in the experiments (15, 33 and 50 vol.%), and five substrate temperatures (200, 250, 300, 350 and 400 °C). The phase composition was evaluated using X-ray diffraction (XRD). X-ray microanalysis (WDS) and glow discharge emission spectroscopy (GDOES) techniques were used to study the nitrogen content and distribution in the coatings. The microstructure was investigated using a scanning electron microscope (SEM). Formation of the S-phase diffusion sub-layers was observed in the atmospheres containing 50 and 33 vol.% N2 respectively at temperatures of 300 and 350 °C or higher. Nitrogen diffusion into the substrate also occurred with the 15 vol% N2 atmosphere at 350 °C or higher although no supersaturated solution was formed in these conditions.