Microstructure evolution and mechanical properties of refractory high-entropy alloy nitride film

Abstract

The (TiZrNbMo)Nx refractory high-entropy alloys (RHEAs) nitride films were fabricated using reactive magnetron sputtering by modifying the N2 flow rate ratio in the mixed N2 + Ar atmosphere. The incorporation of the N element induced a phase transition in the (TiZrNbMo)Nx films from body-centered cubic (BCC) to face-centered cubic (FCC) structure, accompanied by increasing in the amorphous phase. With the introduction of N2, the hardness of (TiZrNbMo)Nx films firstly increased significantly to 25.2 GPa when the N2 flow rate ratio was at 50 % and then decreased slightly to 18.5 GPa when the N2 flow rate ratio was at 75 %. Theoretical analysis shows that the doping of N element enhances the solid strengthening effect, with the formation of nitride phases and grain boundary (GB) strengthening effect significantly contributing to the enhanced hardness. Furthermore, the addition of N element can also inhibit grain rotation and GB sliding during deformation. This work provides a new insight into understanding the structure and properties of refractory high-entropy alloy films.