Abstract
Diamond-like carbon (DLC) and TiAlSiCN nanocomposite coatings were synthesized by multi-plasma immersion ion implantation and deposition. The DLC content in the composite coating was controlled by the flow ratio of N 2 to C 2H 2 during the deposition process. The microstructure and tribological properties of the as-deposited coatings were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, transmission electron microscopy (TEM), Fourier transform infrared spectroscopy (FTIR), nanoindentation and ball-on-disk friction tests. The TEM results show that all the DLC-TiAlSiCN coatings had a two phase composite structure of the TiCN nanocrystals embedded in an amorphous matrix consisting of a-Si 3N 4, a-SiC, a-CN and DLC. TEM observations also reveal that the spacing between the adjacent nanocrystals increases with DLC content. In addition, the DLC-TiAlSiCN nanocomposite coating with a small crystalline spacing of about 0.6 nm shows a higher hardness up to 50 GPa and a larger friction coefficient. An increase in the DLC content of the coating benefits its friction coefficient while its hardness decreases. The friction coefficient reduces to 0.14 when the DLC content is about 31%.
Published Version
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