Abstract
Polycrystalline ZnO films were fabricated using rf magnetron sputtering under different oxygen flow rates ( P O). The surface morphology of the films can be affected by changing P O, and the average surface roughness decreases with the increasing P O. The increasing P O can improve the grain growth with (0 0 2) orientation. Typical ZnO infrared vibration bands have been observed at 408 and 513 cm −1, and the full width at half maximum of the infrared peak decreases with the increase of P O due to the improved crystallinity. The optical band gap ( E g) of the polycrystalline ZnO films increases from 3.22 eV at P O = 0 sccm to 3.25 eV at P O = 10 sccm because the defects decrease with the increasing P O. The photoluminescence peaks in the region of 2.4–2.7 eV are from the transition between conduction band edge and oxide antisite defects (O Zn), and also be influenced by oxygen vacancies (V O).
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.