Microstructure and optical properties of Au:N doped diamond-like carbon films: Effect of working pressure

Abstract

In recent years, the incorporation of impurities (metallic or non-metallic) into diamond-like carbon films for industrial and biological applications has garnered considerable attention from researchers. In this study, gold nanoparticles and nitrogen impurities were introduced into diamond-like carbon using a co-deposition method involving Radio Frequency Plasma-Enhanced Chemical Vapor Deposition (RF-PECVD) and Radio Frequency Sputtering (RF-sputtering),modifying the working pressure from 14.5 to 19.5 mTorr. X-ray Diffraction (XRD) patterns confirmed the presence of gold nanocrystals in the samples. The surface morphology of the films was analyzed using images obtained from Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) subjected to statistical and fractal analyses. These investigations revealed non-symmetric Gaussian distributions of the grains, demonstrating a multifractal nature in all samples, as well as a complex relationship between film roughness and working pressure. Films prepared at working pressures of 16.5 and 18.5 mTorr exhibited the roughest and smoothest surfaces, respectively. Fast Fourier Infrared (FTIR) spectroscopy was used to identify functional groups and to estimate the sp2/sp3 ratio. Raman spectra show D and G bands associated with the disordered graphitic carbon of the DLC, with the intensity of the G band being higher than that of the D band, indicating a higher sp2 bonding content compared to sp3 bonding. Subsequently, the absorption UV–visible spectrum of the samples was examined, confirming the presence of gold nanoparticles in the films, as evidenced by the occurrence of a Localized Surface Plasmon Resonance peak, whose location dependent on the working pressure used during deposition. These observations are consistent with other microscopic and structural analyses.