Microstructure and Mechanical Properties of (TiAlZrNb) N Films

Abstract

(TiAlZrNb)N hard reactive films are prepared by multi-arc ion plating technology using the combination of Ti-18Al-11Zr (at%) and Ti-25Nb (at%) alloy targets. The high speed steel (HSS) is adopted as substrate. The surface and cross-fracture morphology, the surface compositions and the phase structures of the as-deposited (TiAlZrNb)N films are observed and measured by scan electronic microscope (SEM), energy dispersive spectroscopy (EDS) and X-ray diffraction (XRD). The mechanical properties including micro-hardness, adhesion between film and substrate, friction and wear resistance and thermal shock resistance of the as-deposited (TiAlZrNb)N films are systemically investigated. The effects of deposition bias voltage and the addition of Nb element on the as-deposited (TiAlZrNb)N films are discussed. It is revealed that the comprehensive performances including micro-hardness, adhesion and friction resistance can be achieved by the (TiAlZrNb)N hard reactive film with deposition bias voltage of 150V.