Abstract
DLC films with dispersed high crystallinity CrN nanoparticles were prepared by high power pulsed magnetron discharge plasma ion implantation deposition(HPPMS-PIID) combined with DC magnetron sputtering(DCMS).The surface morphology,structure and properties of CrN-DLC films with the different currents of C target were studied.The results show that the C content increases as the raise of the current of the C target and clear characteristics of DLC films are found at a higher C content.CrN doped in DLC exists as nanoparticles with highly 200 preferred orientation, and the smallest size of the CrN grains is 42.39 nm.The C1s peak primarily consists of the three peaks that correspond to C-sp~2,C-sp~3 and CN-sp~3,and the ratio of total sp~3 to sp~2 is 44.8%.Excellent adhesion between film and substrate with critical load of 66.8 N and high nanohardness up to 24.3 GPa are achieved due to highly energetic ion bombardment and implantation in HPPMS-PIID.
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