Abstract
The magnetic properties and microstructure of FePt films grown on MoC layer and MoC/(Mg–X)O (X=Cu, Ni, Co) combined intermediate layers were studied. The (Mg–X)O (X=Cu, Ni, Co) layer with thickness of 5nm was deposited on CrRu seed layer at 395°C. The CrRu (200) texture was enhanced which may due to well grains growth in specific orientation and small lattice mismatch with (Mg–X)O (X=Cu, Ni, Co). Finally, the FePt/MoC layers were deposited on (Mg–X)O layer at 425°C. Using MoC/MgCuO combined intermediate layers, the rocking width of FePt (001) and CrRu (200) diffraction peak were changed from 7.1° to 6.1°, and 5.7° to 3.8°, respectively. For MoC/MgCoO dual intermediate layers, the rocking width of FePt (001) and CrRu (200) diffraction peak were 6.7° and 4.1°. The FePt/MoC/MgCoO film illustrates perpendicular magnetic anisotropy with out-of plane coercivity of 9.3kOe which is higher than FePt film deposited on MoC layer (8.5kOe) and the in-plane loops is linear. From microstructure, the FePt grains were more separated on MoC/(Mg–X)O (X=Cu, Ni, Co) combined intermediate layers.
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