Abstract
Amorphous materials have a promising application in irradiation environment. However, the mechanism of irradiation-induced mechanical property changes is not clear yet. In this work, Zr-Si amorphous films were sputtered and the bonding status was optimized based on sputtering parameters. Helium ion irradiation was introduced to study the microstructural evolution as well as the mechanical behavior changes in Zr55Si45 amorphous film. The change of bonding status and the increase of free volume in amorphous material were identified. The elastic modulus increased with the formation of Zr-Si covalent bonds after irradiation. Combined with changes of internal free volume, the plasticity of amorphous materials was improved. No helium bubbles were found in the interior. Thus the bonding states and free volume can synergeticly affect the mechanical properties of Zr55Si45 amorphous film.
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