Microstructural analysis of GaN films grown on (1 0 0) MgF2 substrate by 4D nanobeam diffraction and energy-dispersive X-ray spectrometry

Abstract

The use of highly efficient and solarblind GaN photocathodes as part of multichannel plate UV detectors for applications in astronomy would strongly benefit from the direct growth of GaN on typical window materials with high transmission down to the deep UV range. GaN growth on MgF2 substrates by plasma-assisted molecular beam epitaxy has recently been demonstrated. Here, we report an extensive scanning transmission electron microscopy study of the thin film microstructure for growth at 525 °C and 650 °C on (100) MgF2. These results are systematically supported by X-ray diffraction reciprocal space maps. For both growth temperatures predominant cubic (111), (115) and (110) GaN is found with no preferred nucleation on the substrate and typical grain sizes of 100–200 nm. All observed orientations can be understood as the result of first and second order twins on different {111} planes related to the underlying substrate. The higher growth temperature shows a strongly increased twin density along with a higher surface roughness. Furthermore, grains with cubic (110) GaN growth show a reduced density and a reduced size of about 20 nm. In addition, in-diffusion of Mg and F into the GaN is observed, which is accompanied by the formation of cavities in the MgF2 directly at the interface.