Abstract
Small-angle neutron scattering is applied to the analysis of latent microstructures in compositionally separated CoCr thin films. A fine in-grain structure less than 10 nm in size is observed in a film deposited at 200°C using small-angle scattering. This structure coincides with that observed by means of transmission electron microscopy (TEM) in chemically etched thin films. The fine in-grain structure disappears when the deposition temperature is increased to 400°C. This experiment confirms the existence of latent microstructures in CoCr films and reveals that further analysis of magnetic microstructures is possible using neutron scattering.
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