Abstract
In this paper, the effects of hollow nanospheres diameter on gas sensing characteristics are studied by simulation and experimental method. Two-dimensional sensor model and hollow spheres material model are established to study the distribution of gas concentration, temperature and current density. Simulation results show that the diameter of nanospheres have a significant influence on the current density distribution, and both too large diameter and too small diameter will reduce sensor response. SnO2 hollow spheres with different diameters are fabricated for experimental verification. The experimental results agree with the simulation results. The size of the hollow spheres changes, the response of sensor, the optimal operating temperature, and the selectivity also change. Compared with 100 nm and 2000 nm, 500 nm hollow nanospheres sensor has higher selectivity and response value. The response is 43 for 100 ppm ethanol when the sensor operates at the optimum operating temperature.
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