Microring bio-chemical sensor with integrated low dark current Ge photodetector

Abstract

An integrated Ge photodetector of very low dark current density is demonstrated in an optoelectronic integrated circuit label-free biosensing system. The sensor system consists of a microring for optical sensing and a monolithically integrated Ge detector. For point-of-care applications, integration of Ge detector increases the reliability of measurement by eliminating mechanical-optical alignment of output signals. Optimizing Ge detector performance will further enhance system signal-noise ratio and reliability. For homogeneous sensing, the system has a sensitivity of ∼18.8 nm/RIU and a detection limit of 3.50 × 10−5.